PLASMA PROCESS RESEARCH
Silicon Valley
Team of industry experts in plasma process chemistry, physics, engineering, R&D
Team of industry experts in plasma process chemistry, physics, engineering, R&D
Modeling of physical and chemical processes in plasma chambers
Modeling of physical and chemical processes in plasma chambers
Generating insights for micro- and nanofabrication process engineering and development
Generating insights for micro- and nanofabrication process engineering and development
Supporting micro-nanoelectronics industry R&D
Supporting micro-nanoelectronics industry R&D
Applicable industry areas:
Applicable industry areas:
Atomic Layer Etching and Deposition (Thermal and Plasma Assisted)
Orientation-Dependent Etching and Deposition
Are-Selective Deposition
Magnetron Sputtering
Synthesis of Nanostructures by Thermal and Non-Equilibrium Plasmas
APPLICATION software:
APPLICATION software:
CFDAce VizGlowGaussianOrcaGAMESSVASPCrystalCP2K
Supporting micro-nanoelectronics industry R&D:
Design of plasma processing chambers
Plasma behavior features in process chambers
Proprietary custom applications:
Plasma and gas diagnostics
Process conditions optimization
Experimental Validation and Proof of concept of plasma process models
Plasma chemistry development
Surface chemistry development
Precursors and etchants design
Recombination, coefficients calculations
Magnetron Sputtering
Multi-scale modelling
